| 摘要 |
PURPOSE:To obtain a multilayer base material by a method wherein a superconductor thin film is formed on a ceramic base material, which is irradiated by a laser beam to form a wiring on it, and substrates are made to adhere to the base material, which are press-bonded as it is heated to obtain a multilayer board. CONSTITUTION:Both faces of a ceramic base material 1 are degreased, and the base material 1 is placed in a vacuum vessel 5 apart from its lower part by a required distance, where the pressure in the vessel 5 is between 10<-6>-10<-8>Torr. The base material 1 is coated with a superconductor (for example, La-Sr-CuO, Y-Ba-Cu-O, or organic substance) evaporated from the lower part of the vessel 5 to form a superconductor thin film, which is irradiated by a laser beam for the formation of a wiring 2. The base material 1 applied with an adhesive agent on its both faces is sandwiched between substrates 4, which is press-bonded as it is heated. By these processes, a multilayer board can be obtained. |
