发明名称 ELECTRICALLY ERASABLE PROM
摘要 PURPOSE:To write or erase data in a memory without separately necessity of an ultraviolet ray irradiating unit by forming by growing bumps controlled in their density and size at the side of a polycrystalline silicon gate of a first layer corresponding to a polycrystalline silicon gate of a second layer, and varying a voltage to be applied to the gate of the second layer. CONSTITUTION:Bumps 4a controlled in their density and size are formed by growing on the surface of a polycrystalline silicon gate 4 of a first layer. In order to erase written data, a silicon substrate 1, a source diffused layer 7a and a drain diffused layer 7b are all grounded, and a positive voltage, such as approx. 30V is applied to a polycrystalline silicon gate 6 of a second layer thereby to attract electrons (data) stored in the gate 4 to the gate 6 by utilizing an end discharge from the bumps 4a, thereby erasing the data.
申请公布号 JPH01133372(A) 申请公布日期 1989.05.25
申请号 JP19870292706 申请日期 1987.11.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 KIMURA SHINJI
分类号 H01L21/8247;H01L21/8246;H01L27/10;H01L27/112;H01L29/78;H01L29/788;H01L29/792 主分类号 H01L21/8247
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