| 摘要 |
PURPOSE:To provide a vessel having a long service life in high-temp. use by coating a Ta-base metal with an Rh-base metal in which oxides are dispersed. CONSTITUTION:This clad vessel is formed by coating Ta or Ta alloy with Rh or Rh alloy in which oxides are dispersed. since this vessel has superior oxidation resistance, and further, oxides are dispersed in a coating film and grain growth at high temp. is inhibited, the service life of this vessel is prolonged. Moreover, Al2O3, ZrO2, Y2O3, etc., can be used as the above oxides, and it is preferable to regulate the amount of oxides to about 0.02-10vol.%, The above clad vessel can be manufactured, e.g., by simultaneously using two targets of Rh and Y2O3 and executing binary simultaneous sputtering of the above two targets onto the inner wall of a crucible made of Ta. |
