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发明名称
METHOD AND APPARATUS FOR MEASURING DEPTH OF FINE GROOVE
摘要
申请公布号
JPH01132906(A)
申请公布日期
1989.05.25
申请号
JP19870291231
申请日期
1987.11.18
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
TAKADA KAZUMASA;NODA JUICHI
分类号
G01B11/22
主分类号
G01B11/22
代理机构
代理人
主权项
地址
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