MAGNETRON SPRAYING SYSTEM

摘要

FIELD: plasma engineering; spraying thin films of metals and their alloys on sheet insulating materials of large area. SUBSTANCE: system has chamber accommodating cathodes and magnetic system. Cathodes are made in the form of sprayed material tubes provided with individual magnetic systems placed vertically in single row and spaced 100-200 mm apart; substrates are made of sheet material and placed on either side along side wall of chamber; they are free to displace relative to cathode row. EFFECT: improved design. 4 dwgu