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发明名称
MANUFACTURE OF SILICA FILM
摘要
申请公布号
JPH01132128(A)
申请公布日期
1989.05.24
申请号
JP19870289315
申请日期
1987.11.18
申请人
HITACHI LTD
发明人
ITO CHIKAICHI;HONMA YOSHIO
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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