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发明名称
FILAMENTLOSES MAGNETRON-IONENSTRAHLSYSTEM
摘要
申请公布号
DE3738352(A1)
申请公布日期
1989.05.24
申请号
DE19873738352
申请日期
1987.11.11
申请人
TECHNICS PLASMA GMBH
发明人
MOEHL,WOLFGANG,DIPL.-PHYS.DR.
分类号
H01J27/16;H01J27/18;H01J37/08
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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