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发明名称
PATTERNING THIN FILM SUPERCONDUCTORS USING FOCUSED BEAM TECHNIQUES
摘要
申请公布号
EP0310248(A3)
申请公布日期
1989.05.24
申请号
EP19880308081
申请日期
1988.09.01
申请人
GENERAL MOTORS CORPORATION
发明人
MANTESE, JOSEPH VITO;MICHELI, ADOLPH LOUIS;HAMDI, ABOUD HALAL;CATALAN, ANTONIO BUDDY
分类号
C01G3/00;C01B13/14;C01G1/00;C23C18/12;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):H01L39/24;H01J37/30;G03G5/02
主分类号
C01G3/00
代理机构
代理人
主权项
地址
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