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发明名称
METHOD FOR MEASURING AIRTIGHTNESS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01131428(A)
申请公布日期
1989.05.24
申请号
JP19870291122
申请日期
1987.11.17
申请人
NEC CORP
发明人
HAYAKAWA YUKIO
分类号
H01L21/66;G01M3/26;H01L23/02
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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