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发明名称
METHOD OF DRY ETCHING
摘要
申请公布号
EP0301335(A3)
申请公布日期
1989.05.24
申请号
EP19880111438
申请日期
1988.07.15
申请人
HITACHI, LTD.
发明人
TACHI, SHINICHI;TSUJIMOTO, KAZUNORI;OKUDAIRA, SAKAYUKI
分类号
H01L21/3205;H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;(IPC1-7):H01L21/31;H01L21/306
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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