METHOD AND APPARATUS FOR IGNITING A HYPERFREQUENCY ION SOURCE,申请号EP19850402076-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR IGNITING A HYPERFREQUENCY ION SOURCE
摘要
申请公布号	EP0184475(B1)	申请公布日期	1989.05.24
申请号	EP19850402076	申请日期	1985.10.25
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE	发明人	GUALANDRIS, RENE;LUDWIG, PAUL;ROCCO, JEAN-CLAUDE;ZADWORNY, FRANCOIS
分类号	H01J27/08;H01J27/16;H05H1/46	主分类号	H01J27/08
代理机构		代理人
主权项
地址

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