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发明名称
ION SOURCE
摘要
申请公布号
JPH01132033(A)
申请公布日期
1989.05.24
申请号
JP19870290345
申请日期
1987.11.17
申请人
HITACHI LTD
发明人
HASHIMOTO ISAO;KADOOKA HIDESHI
分类号
H01J27/08;H01J27/14;H01J37/08
主分类号
H01J27/08
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