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经营范围
发明名称
PATTERN FLATTENING METHOD
摘要
申请公布号
JPH01130543(A)
申请公布日期
1989.05.23
申请号
JP19870290354
申请日期
1987.11.17
申请人
SONY CORP
发明人
WADA MASARU;OKUHORA AKIHIKO
分类号
H01L21/3205
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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