发明名称 |
Production of shaped articles of ultra-pure silicon |
摘要 |
Shaped articles, e.g., bars, of semiconductor-grade, ultra-pure silicon, are facilely and efficiently produced by thermally decomposing/pyrolyzing a monosilane feedstream on a red-heated silicon support member, whereby high purity silicon is deposited thereon, and thence recycling the majority of the by-product reaction admixture into said monosilane feedstream.
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申请公布号 |
US4831964(A) |
申请公布日期 |
1989.05.23 |
申请号 |
US19870137617 |
申请日期 |
1987.12.24 |
申请人 |
RHONE-POULENC SPECIALITES CHIMIQUES |
发明人 |
JACUBERT, SERGE;BOUDOT, BERNARD;NATAF, PHILIPPE |
分类号 |
C01B33/02;C01B33/029;C01B33/035 |
主分类号 |
C01B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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