Scanning imaging system and method

摘要

A light beam focusing system provides a diffraction limited spot across a wide flat field format by using a scanning surface arranged with a system of spherical mirrors to achieve dynamic field flattening. The scanning surface is pivoted about an axis of rotation to image the beam along a noncircular image line, and the spherical mirror system provides magnification of the image in a sense and amplitude to provide a substantially uniform focused scanning spot throughout the flat object field. The system compensates for higher order spherical aberrrations, is fully achromatic and can be used with high power beams.