摘要 |
PURPOSE:To safely regenerate a ferric chloride etchant at a low cost by regenerating the etchant by air oxidation in the presence of nitric acid radicals. CONSTITUTION:Nitric acid is added to a ferric chloride etchant so as to regulate the concn. of nitric acid radicals to about 5-500g per 1kg iron and the etchant is subjected to air oxidation treatment at about 50-70 deg.C. The etchant can be continuously and safely regenerated and recycled. |