| 摘要 |
An improved apparatus and method are described for accurately "reconstructing" steep surface profiles, such as for aspheric surfaces, using improved two-wavelength phase-shifting interferometry, wherein single-wavelength precision is obtained over surfaces having departures of hundreds of visible wavelengths from a reference surface. The disclosed technique avoids cumulative summing of detector errors over a large detector array by computing the "equivalent" phase for each detector independently of the intensities of other detectors. Inaccurate phase data points having an equivalent fringe contrast less than a predetermined threshold are eliminated from data from which contour maps of the aspheric surface are displayed or plotted.
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