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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH01130553(A)
申请公布日期
1989.05.23
申请号
JP19870289701
申请日期
1987.11.17
申请人
SANYO ELECTRIC CO LTD
发明人
FUJINUMA CHIKAO;SEKIKAWA NOBUYUKI
分类号
H01L27/06;H01L21/8222
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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