| 摘要 |
PURPOSE:To easily move a moving body at a high speed by attaching 3 piezoelectric vibrators to a driver, and altering the phase, amplitude and frequency of a driving voltage to be applied thereto. CONSTITUTION:A square plate made of metal is used as a driver 1, and a first piezoelectric vibrator 3 formed with a flat platelike common electrode 4 on one side face of the plate and split electrodes 5 on the other side face is secured with the electrode 4 disposed at its driver side. A second piezoelectric vibrator 6 formed with a common electrode 7 in a rodlike state on one side face and spit electrodes 8 on the other side face is secured to the side face of the driver. Further, a third piezoelectric vibrator 9 formed with split electrodes 11 is secured, a moving body 2 adhered with a frictional material 13 made of metal or the like is disposed under pressure to the face 12 not attached with the vibrator 3 of the driver 1 to form an actuator. Thus, the body 2 can be moved freely laterally and longitudinally by the polarity, phase and amplitude of the signal to be applied to a terminal 16. |
