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发明名称
Single-turn induction heating coil for floating-zone melting process
摘要
申请公布号
US4833287(A)
申请公布日期
1989.05.23
申请号
US19880171443
申请日期
1988.03.21
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
ABE, TAKAO;MURAOKA, SHYOUZO
分类号
H05B6/32;C30B13/20;H01L21/208;H05B6/36
主分类号
H05B6/32
代理机构
代理人
主权项
地址
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