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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH11154730(A)
申请公布日期
1999.06.08
申请号
JP19970319953
申请日期
1997.11.20
申请人
NEC CORP
发明人
ISHIKURA KOJI
分类号
H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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