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经营范围
发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH01129432(A)
申请公布日期
1989.05.22
申请号
JP19870289075
申请日期
1987.11.16
申请人
NEC CORP
发明人
KATAGIRI MASARU
分类号
H01L21/66;G01R31/28
主分类号
H01L21/66
代理机构
代理人
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地址
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