| 摘要 |
PURPOSE:To effectively supply X rays irradiated from an X rays generating part to an area between electrodes, to reduce output of the X rays required for preelectrolytic dissociation, and to prevent leakage of the X rays by providing the X rays generating part within a pressure container which is adjacent to the rear face side of electrode. CONSTITUTION:By applying a high-voltage pulse from a power supply for X-rays tube 29 through a switch element 28, voltage is applied between a heat cathode electrode 26 and a target body 25 to allow electrons emitted from the heat cathode 26 to be accelerated and to allow X rays to be generated colliding against the target body 25. The X rays thus generated permeates a discharge surface 22 of a cathode 16, reaches an area between this cathode 16 and an anode 17, and performs preelectrolytic dissociation of gas laser media which is located between these electrodes 16 and 17. This preelectrolytic dissociation allows a stage discharge to be generated between the electrodes 16 and 17. At this time, the electrodes 16 and 17 generate glow discharge on nearly the entire surface, thus enabling laser light to oscillate. An X-rays tube 24 is provided along with the electrode 16 provided within a pressure container 15, thus preventing the generated X rays from leaking to the outside of the pressure container 15. |
