| 摘要 |
PURPOSE:To reduce reflection against a long waveform light at the interface between an amorphous photoelectromotive force element and an insulator to improve total output characteristics of the entire device by constituting the insulator with amorphous silicon alloy including at least one element out of carbon and nitrogen and oxygen. CONSTITUTION:An amorphous photoelectromotive force element SC1 which performs photoelectric conversion operation by absorbing reflection light at the front stage in light inciding direction on a common substrate 1 and an insulator 7 of a-Si alloy whose refraction rate is nearly equal to that of the photoelectromotive force element SC1 is provided. Then, a crystalline photoelectromotive force element SC2 which absorbs the arrived long waveform light and performs photoelectric conversion operation without being absorbed by the amorphous photoelectromotive element SC1 and the insulator 7 is laminated, is connected in series optically, and is dissolved electrically. Also, individual photoelectric conversion output is introduced from the output terminals T11.T12 and T21.T22 which are connected to electrodes 2.6, 8.11 for each element SC1 and SC2. Then insulator 7 is formed with a film thickness of 0.5-1mum consisting of at least one element out of carbon and nitrogen and oxygen. |
