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经营范围
发明名称
LAMP ANNEALING DEVICE
摘要
申请公布号
JPH01128520(A)
申请公布日期
1989.05.22
申请号
JP19870286874
申请日期
1987.11.13
申请人
SEIKO EPSON CORP
发明人
SATO MIZUO
分类号
H01L21/26
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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