| 摘要 |
<p>PURPOSE:To prevent the damage to a board like object and carry out proper delivery by setting the interval between the engaging members of a board like object holding device smaller than the supporting zone of a supporting base at the time of translocating the board like object to the supporting base while setting larger than the supporting base at the time of receiving the board like object from the supporting base. CONSTITUTION:The movable range of an adsorbedly held board like object 1 is restricted in the direction parallel to the adsorbing face by plural engaging members 5A. Therefore, at the time of setting the board like object 1 to a supporting base 20, since the interval Sa between the engaging members 5A is limited within a range smaller than the range for setting the board like object 1 of the supporting base 20, the board like object 1 can be properly set onto the supporting face of the supporting base 20. Also, at the time of lifting up the board like object 11 from the supporting base 20, as the interval Sb between the engaging members 5B of a receiving holding device B are set larger than the outer periphery of the supporting base 20, the board like object 1 can be held rapidly with noncontact, without hitting against the engaging members 5B.</p> |
