| 摘要 |
PURPOSE:To enable the application of the title actuator even to a thin mirror by providing an elastic parallel link as a rectilinear guide element of a universal joint in a cylindrical body and using a tuning fork oscillation type load cell having a power detecting capacity of high accuracy. CONSTITUTION:The supporting load in the direction perpendicular to the axis of a mirror 1 is born to the mirror 1 via the universal joint 7, the elastic parallel link 10 and the cylindrical body 2 by a supporting rod 6. The supporting load in the axial direction of the mirror 1 is born to the mirror 1 partly via the universal joint 7, a universal joint rest 4, a connecting material 9, the tuning fork oscillation type load cell 11, and the cylindrical body 2 and simultaneously via the universal joint 7, a universal joint rest 4, the elastic parallel link 10, and the cylindrical body 2. Of the supporting loads, the load transmitted through the connecting material 9 and the tuning fork oscillation type load cell 11 is detected with the accuracy of 10<-4> detection accuracy by the tuning fork oscillation type load cell 11. The application of the title actuator as the actuator to the thin mirror is thereby enabled. |
