| 摘要 |
PURPOSE:To simplify the constitution of the title sensor and to exactly detect only the concn. of a combustible gas by covering the surface of a transistor constituted by using only the electrodes inert to gases with a proton conductor film. CONSTITUTION:The gaseous CO, when introduced A into the sensor, arrives at the gate electrode 61 of the one field effect transistor by passing the proton conductor film 8. Since the gate electrode 61 is kept held at an electrified state by the catalytic effect of platinum, the negative potential increases with an increase in the concn. of the gaseous CO is generated. On the other hand, silver is not sensitive to the combustible gas at all and, therefore, the source electrode 71 is held at the prescribed potential in spite of a change in the concn. of the gaseous CO. The potential corresponding to the concn. of the combustible gas is eventually impressed between the source and gate electrodes 71 and 72. The current characteristic decreasing with a decrease in the concn. of the gaseous CO is exhibited when the specified voltage is impressed between the source and drain electrodes. Since the electrons generated near the electrode 6 are preserved without being consumed, the exact concn. of the combustible gas is measured. |
