| 摘要 |
PURPOSE:To decrease the influence exerted on an electron beam caused by an electric field of a piezoelectric element even when a scanning tunnel microscope STM has been integrated into an electron microscope by shielding a scanning unit part to which the piezoelectric element has been attached, by a conductive body. CONSTITUTION:An STM unit 1 and a sample 2 are integrated into a holder 12 and this unit 1 is shielded by a conductor 10. In the unit 1, a probe 3 is installed to a head 4, and the head 4 is supported by insulating plates 5, 7 and piezoelectric elements 6, 8 and 9. By driving the elements 6, 8 and 9, the surface of the sample 2 is scanned by the probe 3 and an uneven image on the surface of the sample 2 is obtained, based on a tunnel current and an applied voltage of the elements 6, 8 and 9. In such a way, even if the unit 1 is integrated into an electron microscope, such an influence as an electron beam 16 is deflected by the influence of an electric field by the elements 6, 8 and 9 can be eliminated. Also, even at the time when the electron beam 16 is radiated to the sample by the electron microscope, it is avoided that the unit 1 is brought to charge-up. |
