发明名称 MAGNETRON ION SOURCE WITHOUT FILAMENT AND PROCESS FOR USING SAME
摘要 The invention concerns a magnetron ion source without filament comprising a magnetron, a microwave waveguide or a microwave coaxial line, a cylindrical hollow resonator, a lambda 4 choke piston, ECR magnets and a quartz dome. Also described is a process for using said device.
申请公布号 WO8904546(A1) 申请公布日期 1989.05.18
申请号 WO1988EP01015 申请日期 1988.11.10
申请人 TECHNICS PLASMA GMBH 发明人 MOEHL, WOLFGANG
分类号 H01J27/16;H01J27/18;H01J37/08;(IPC1-7):H01J27/18 主分类号 H01J27/16
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