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发明名称
DEVICE FOR INTRODUCING LATTICE DEFECT TO REAR OF SEMICONDUCTOR WAFER
摘要
申请公布号
JPH01125832(A)
申请公布日期
1989.05.18
申请号
JP19870284033
申请日期
1987.11.10
申请人
TAIYO SANSO CO LTD;MITSUBISHI ELECTRIC CORP
发明人
TADA MASUTA;AKAMATSU KAZUHIKO;FUKUMOTO HAYAAKI;OMORI TOSHIAKI;FUJINO TAKESHI
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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