发明名称 |
IMPROVED ZONE MELT RECRYSTALLIZATION METHOD AND APPARATUS |
摘要 |
The improved zone-melt recrystallization apparatus is comprised of a heating element having a plurality of individually controllable heating elements. The elements are heated in sequence to generate a melted zone within a semiconductor material which is translated across the material by heating then cooling adjacent heating elements to recrystallize the material. |
申请公布号 |
WO8904387(A1) |
申请公布日期 |
1989.05.18 |
申请号 |
WO1988US04012 |
申请日期 |
1988.11.09 |
申请人 |
KOPIN CORPORATION |
发明人 |
ZAVRACKY, PAUL, M.;SALERNO, JACK, P.;ZAVRACKY, MATTHEW, M. |
分类号 |
C30B13/16;C30B13/28;(IPC1-7):C30B13/16 |
主分类号 |
C30B13/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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