| 摘要 |
<p>PURPOSE:To make it possible to index a reference point of a transfer boat with a high accuracy by a method wherein the title device is provided with a detecting mechanism for detecting the position of a specified groove on the side bars of the transfer boat held on a boat receiving stand and a boat receiving stand feed mechanism which is operated according to the undetection of the specified groove. CONSTITUTION:A detecting mechanism 30 mounted to a holder driving unit is placed in the vicinity of a specified groove 6 of a transfer boat 2 lowered on a boat receiving stand 11. In case the mechanism 30 does not detect the specified groove 6, a feed mechanism 19 feeds the stand 11 in the right direction, for example, according to the undetection and the feed operation is continued until the specified groove 6 is detected. Information on the position of the mechanism 30 and the position of the stand 11 at a time when the groove 6 is detected by the mechanism 30 is set as the reference point of the transfer boat and information on this reference point is written in a computer of a transferring machine, for example, and is used as a reference for a wafer transferring operation subsequent to that. In such a way, the reference point of the transfer boat 2 can be calculated by measuring automatically the position of the specified groove.</p> |
