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发明名称
METHOD AND DEVICE FOR NONCONTACT MEASUREMENT OF FILM CHARACTERISTIC
摘要
申请公布号
JPH01124703(A)
申请公布日期
1989.05.17
申请号
JP19870282916
申请日期
1987.11.09
申请人
KAWASAKI STEEL CORP
发明人
TANIMOTO WATARU;YAMAMOTO AKIRA;MATSUMURA TAIJI
分类号
G01B11/06;G01N21/27
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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