| 摘要 |
<p>PURPOSE:To effectively prevent a crack and a chip from generating at the periphery of a wafer, by once receiving the wafer to fall into a wafer housing case at the position of a predetermined height in the case. CONSTITUTION:A wafer W,... is once received by a plate 27 of a movable wafer receiver and housed in its groove 30,... and a groove 11,... formed at beams 12a and 12b of a quartz boat 10. When a forefinger separates from a trigger 35 in this state, the movable wafer receiver 25 pivotally returns from a position to receive the wafer to a waiting position by the elastic force of a coil spring 37. As a result, the wafer W,... further falls and then it is received by a fixed wafer receiver 23 to be housed in a groove 24 thereof. In addition, it is housed in the groove 11,... formed at the beams 12a-12d of the quartz boat 10. Finally, it is completely transferred from a resin case 1 to the quartz boat 10.</p> |
