| 摘要 |
PURPOSE:To enable size measurement which can cover nearly 100% of the regions of patterns by disposing a prescribed circuit pattern to the central part thereof and forming the patterns for size measurement at least at 4 points so as to enclose the prescribed circuit pattern. CONSTITUTION:The patterns 2 for size measurement are disposed at the four ends so as to enclose the chip numbers 41, 42, 43, 44 of the prescribed circuit pattern 1. The patterns are formed by a stepper using this reticle. The sizes of nearly 100% of the regions of the patterns formed by the stepper in such a manner can be measured and since the patterns for the size measurement which exist at the four ends are formed in extreme proximity to each other, the size measurement is executable in the shorter time than in the conventional method. |
