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发明名称
METHOD FOR EVALUATING FILM
摘要
申请公布号
JPH01124757(A)
申请公布日期
1989.05.17
申请号
JP19870282218
申请日期
1987.11.10
申请人
NEC CORP
发明人
MURAKAMI TORU
分类号
G01N27/26;G01N27/30;H01L21/31;H01L21/66
主分类号
G01N27/26
代理机构
代理人
主权项
地址
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