发明名称 PRODUCTION OF THIN-FILM TRANSISTOR ARRAY
摘要 <p>PURPOSE:To easily and surely detect disconnections and short-circuits by connecting gates and source lines consisting of plural parallel conductive films by conductive films for inspection to form a piece of line body and inspecting the conduction and insulation thereof, then removing the conductive films for inspection. CONSTITUTION:The FETs 4 are formed at the intersected points of the gate lines 2 and source lines 3 formed of the plural parallel conductive films on a substrate. The end parts of the lines 2, 3 are connected by the conductive films 22, 23 and 32, 33 for inspection to form a piece of the gate and source line. The conductive of the line 2 is then inspected between terminals 24 and 25 and the conduction of the line 3 is inspected between terminals 34 and 35; further, the insulation between the lines 2 and 3 is inspected between the terminals 24 and 35. A liquid crystal is thereafter injected and the substrate 1 is cut along cutting lines L to remove the conductive films and terminals for inspection, by which the liquid crystal panel is formed. The disconnections and short-circuits of the lines are thereby easily and surely detected in an early period.</p>
申请公布号 JPH01124825(A) 申请公布日期 1989.05.17
申请号 JP19870284053 申请日期 1987.11.10
申请人 NIPPON SOKEN INC;NIPPON DENSO CO LTD 发明人 MIYASHITA KOICHI;HARADA YOSHIHARU;NAKAMURA TAKEHIRO;TOYODA INEO;SATO SUSUMU;YAMAWAKI MASAO
分类号 H01L27/12;G02F1/13;G02F1/136;G02F1/1368;H01L21/66 主分类号 H01L27/12
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