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经营范围
发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH01122124(A)
申请公布日期
1989.05.15
申请号
JP19870280007
申请日期
1987.11.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TOMITA KAZUYUKI;TANAKA YASUO;TANNO MASUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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