发明名称 SEMICONDUCTOR CHIP
摘要 <p>PURPOSE:To accurately dispose a semiconductor chip at a predetermined position on a substrate by providing a positioning mark to be optically detected in a hanging state from a rear face. CONSTITUTION:In a semiconductor chip 12 disposed in a positioning state on a substrate, an optically detectable positioning mark 16 is formed in a hanging state from its rear face. That is, the mark 16 is detectable in a state that the chip 12 is hung. Accordingly, even after the chip 12 is hung, the position of the mark 16 of the chip 12 can be detected. Thus, the chip 12 can be accurately disposed at a predetermined position on the basis of the position of the mark 16.</p>
申请公布号 JPH01122113(A) 申请公布日期 1989.05.15
申请号 JP19870280618 申请日期 1987.11.06
申请人 SUNX LTD 发明人 SEKINE AKIRA;ANDO KOHEI;SHIOSE NOBUYUKI
分类号 H01L21/02;H01L21/68 主分类号 H01L21/02
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