| 摘要 |
<p>PURPOSE: To prevent a crosstalk from occurring between stages in X and Y directions by superposing an AC voltage with a constant amplitude and period on the voltage for one of two piezoelectric actuators in X and Y directions. CONSTITUTION: A stage drive signal Sx in X direction generated from a sweep signal generator 21 in X direction is amplified 22 and is applied to a lamination- type piezoelectric actuator 13 in X direction. Then, a stage 11 in X direction is vibrated and displaced in a direction indicated by an arrow X. On the other hand, a stage drive signal voltage Sy in Y direction being generated by a sweep signal oscillator 23 in Y-axis direction is inputted to an adder 24. Then, a signal voltage Se that is generated by the oscillator 21, is amplified 26, and then is phase-shifted by a phase-shifter 27 is superposed by the adder 24. A stage drive signal voltage Sye in Y direction where the signal voltage Se is superposed is amplified 25 and is applied to a lamination-type piezoelectric actuator 14 in Y direction. Then, the stage 12 in Y direction is vibrated and displaced in Y direction, thus correcting and eliminating a crosstalk between the stages 11 and 12.</p> |
