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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01122137(A)
申请公布日期
1989.05.15
申请号
JP19870280791
申请日期
1987.11.05
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
IMAOKA KAZUNORI;OGURI MANABU
分类号
H01L21/76;H01L21/31
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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