| 摘要 |
PURPOSE:To improve the determination accuracy of fluorescence X-ray analysis by fetching a shield coefficient and finding the function system of four X-ray intensity, element content, sticking amount, and thickness logically. CONSTITUTION:Detectors 32 and 36 detect the intensity of a secondary X ray generated by a Cu film 14 and a Zn film 16 on, for example, an Fe base material 12 to obtain integral intensity values Ic and Iz. Then specific data, said Ic and Iz, and Cu content Pc' selected temporarily are used and the 1st calculated value sigma1' of the shield coefficient of Cu and the sticking amount Mcz' are calculated from a logical expression. Then, the Mcz', Pc', etc., are used to calculate film thickness delta1' and further the 2nd calculated value sigma2' of the shield coefficient of Cu is calculated from, for example, a regressive expression. Then the Pc' is selected repeatedly until the difference between the sigma1' and sigma2' is coincident within desired accuracy and the Pc', Mcz', and delta' when the both coincide with each other are found respectively and determined as the element content, sticking amount, and thickness at the same time. |
