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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH01122123(A)
申请公布日期
1989.05.15
申请号
JP19870279249
申请日期
1987.11.06
申请人
HITACHI LTD
发明人
YAMAGUCHI YASUHIRO;OTSUBO TORU
分类号
H01L21/302;C23C16/50;C23C16/511;H01L21/205;H01L21/3065
主分类号
H01L21/302
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代理人
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