TRAPEZOID LITHOGRAPHY DEVICE USING VARIABLE RECTANGULAR CHARGED PARTICLE BEAM,申请号JP19870278828-传众专利搜索

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发明名称	TRAPEZOID LITHOGRAPHY DEVICE USING VARIABLE RECTANGULAR CHARGED PARTICLE BEAM
摘要
申请公布号	JPH01120821(A)	申请公布日期	1989.05.12
申请号	JP19870278828	申请日期	1987.11.04
申请人	JEOL LTD	发明人	SUGATA MASANORI
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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