| 摘要 |
PURPOSE:To obtain the desired electric conductivity by controlling the mixing fraction of the deposited microcrystal graphite while maintaining the characteristic of a hard carbon film. CONSTITUTION:This film contains carbon and hydrogen as the main constituent and is made of an a-C:H film mixed with the sp<3>3 coupling and sp<2> coupling of carbon, and graphite microcrystals 10-75% is contained in this a-C:H film. When the mixing ratio of graphite microcrystals mixed in the a-C:H film is below 10%, the improvement effect of conductivity due to the deposition of graphite microcrystals is not sufficient, the uncoupled bonds are not reduced so much, and the film is inferior in film stability. When the mixing fraction exceeds 75%, the film quality is deteriorated caused by the increase of graphite crystals, and the hardness becomes insufficient. The preferable mixing fraction of graphite is 20-50%. The conductivity can be thereby controlled at the desired value while the hardness of the diamond class is maintained. |
