| 摘要 |
<p>PURPOSE:To cope with changes of wafer sizes by changing only the position of a subbase and reduce the time required for replacing arrangements, by providing positioning and press-down pins corresponding to wafer sizes on the subbase instead of arranging the foregoing pins or a base. CONSTITUTION:This device is composed of: a subbase 51 which moves vertically to a base 1; an actuator 6 which makes the subbase 5 move up and down; a positioning pin 7a which determines positioning of a wafer 3a placed on the subbase 5; a press-down pin 8a which presses down the wafer 3a to the positioning pin 7a; a positioning pin 7b; and a press-down pin 8b. In the case where positioning towards the wafer 36 which is larger than the wafer 3a is performed, if the subbase goes down by making the actuator move, the positioning pin 7a is unable to determine positioning of wafer 3b but it is determined by the positioning pin 7b. Thus, no man power is required for replacing arrangements on the occasion of changing wafer sizes.</p> |
