DRYING DEVICE FOR SEMICONDUCTOR WAFER,申请号JP19870278575-传众专利搜索

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发明名称	DRYING DEVICE FOR SEMICONDUCTOR WAFER
摘要
申请公布号	JPH01120829(A)	申请公布日期	1989.05.12
申请号	JP19870278575	申请日期	1987.11.04
申请人	OKI ELECTRIC IND CO LTD	发明人	KOSAKA HIROSHI
分类号	F26B5/08;H01L21/304	主分类号	F26B5/08
代理机构		代理人
主权项
地址

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