FORMATION OF COLOR FILTER

摘要

PURPOSE:To easily discover the defective patterning of transparent electrodes by providing patterns in which the electrodes for electrodeposition in order to form the color filters of the same colors are electrically connected within the same substrate at the time of the formation of the color filters. CONSTITUTION:Photoelectric transducers 4 of a contact type image sensor are covered by a transparent protective film 5. This protective film 5 is formed by spin coating of transparent polyimide to about 1mum film thickness. The moisture resistance of said film may be improved by sputtering an SiO2 film to about 6,000Angstrom thereon. ITO which is a transparent conductive film for electrodeposition coating is then sputtered to about 2,000Angstrom and is patterned to the desired pattern by photolithography to form the comb-shaped electrodes 2, 3 for electrodeposition in the state of intermeshing the electrodes with each other. This substrate 1 is immersed in an electrodeposition liquid of, for example, cyan. The coated film of the cyan is formed on the transparent electrodes 2 for electrodeposition if a positive voltage is impressed to the electrodes 2 and a negative voltage is impressed to the electrode facing the substrate 1; therefore, the coated film is thereafter calcined. The coated film of yellow is similarly formed on the transparent electrodes 3 by using an electrodeposition liquid for yellow.