| 摘要 |
PURPOSE:To improve reliability by using a thin-film conductor formed by printing of a paste contg. a metallic org. compd. as counter electrodes. CONSTITUTION:The counter electrodes 6 consisting of the thin-film conductor formed by thermal cracking of the metallic org. compd. are formed on the front side of an insulating substrate 1 consisting of ceramics, etc. A tin oxide semiconductor film 3 is formed across the electrodes 6 and further a catalyst layer 4 are formed. Heating elements 5 consisting of a thick film consisting of a platinum system are formed on the rear side of the substrate 1. The influence of a step on the sensitive film formed in the upper part is thereby eliminated, by which the defect of the film form in the step part is prevented and the reliability is improved. |
